Mechanistic insight into gas-phase reactions of H. + Si2H6 and hydrogen atom etching of silicon surfaces
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Published in | Journal of the American Chemical Society Vol. 115; no. 9; pp. 3731 - 3738 |
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Main Authors | , |
Format | Journal Article |
Language | English |
Published |
Washington, DC
American Chemical Society
05.05.1993
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Subjects | |
Online Access | Get full text |
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ISSN: | 0002-7863 1520-5126 |
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DOI: | 10.1021/ja00062a044 |