Electrochemical planarization of ULSI copper
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Published in | Solid state technology Vol. 40; no. 6; pp. 155 - 162 |
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Main Authors | , , , , |
Format | Magazine Article |
Language | English |
Published |
Tulsa, OK
PennWell
01.06.1997
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Subjects | |
Online Access | Get full text |
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ISSN: | 0038-111X |
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