A model for the gas-phase chemistry occurring in a furnace N2O oxynitride process
Saved in:
Published in | Journal of the Electrochemical Society Vol. 143; no. 5; pp. 1753 - 1762 |
---|---|
Main Authors | , |
Format | Journal Article |
Language | English |
Published |
Pennington, NJ
Electrochemical Society
01.05.1996
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
ISSN: | 0013-4651 1945-7111 |
---|---|
DOI: | 10.1149/1.1836712 |