Low temperature CVD of crystalline titanium dioxide films using tetranitratotitanium(IV)
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Published in | Chemical vapor deposition Vol. 4; no. 1; pp. 9 - 11 |
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Main Authors | , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Weinheim
Wiley-VCH
1998
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Subjects | |
Online Access | Get full text |
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ISSN: | 0948-1907 1521-3862 |
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DOI: | 10.1002/(sici)1521-3862(199801)04:01<9::aid-cvde9>3.3.co;2-v |