Iridium oxide as low temperature NO2-sensitive material for work function-based gas sensors

The films were characterized using Rutherford backscattering spectroscopy, X-ray diffraction analysis, and scanning electron microscopy to determine their composition, phase, and surface morphology.

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Bibliographic Details
Published inIEEE sensors journal Vol. 4; no. 2; p. 189
Main Authors Karthigeyan, A, Gupta, R.P, Scharnagl, K, Burgmair, M, Zimmer, M, Sulima, T, Venkataraj, S, Sharma, S.K, Eisele, I
Format Journal Article
LanguageEnglish
Published New York The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 01.04.2004
Subjects
Scanning electron microscopy
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Summary:The films were characterized using Rutherford backscattering spectroscopy, X-ray diffraction analysis, and scanning electron microscopy to determine their composition, phase, and surface morphology.
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2004.823651