Characterization of all-solid-state thin-film batteries with V2O5 thin-film cathodes using ex situ and in situ processes

• Published in: Journal of the Electrochemical Society Vol. 148; no. 4; pp. A318 - A322
• Main Authors: Jeon, E J, Shin, Y W, Nam, S C, Cho, W I, Yoon, Y S
• Format: Journal Article
• Language: English
• Published: Pennington, NJ Electrochemical Society 01.04.2001
• Subjects: Applied sciences; Direct energy conversion and energy accumulation; Electrical engineering. Electrical power engineering; Electrical power engineering; Electrochemical conversion: primary and secondary batteries, fuel cells; Exact sciences and technology; Atomic force microscopy; Scanning electron microscopy; Solid electrolyte; Electrode material; Discharge charge cycle; Surface structure; Lithium Phosphorus Nitrides oxides; Vanadium V Oxides; Thin layer electrode; Morphology; Preparation; Battery; Equivalent circuit; Microstructure; Specific capacity; Electrical characteristic
• ISSN: 0013-4651; 1945-7111
• DOI: 10.1149/1.1354609

A thin-film battery with cell structure of Li/LiPON/V2O5/Pt was fabricated by in situ and ex situ processes. In the in situ process, LiPON (lithium phosphorus oxynitride) electrolyte thin film was deposited on V2O5 thin film by radio frequency reactive sputtering. After deposition of the amorphous LiPON, a thermal evaporator grew Li metal film as an anode. The interfacial and charge transfer resistances of a thin-film battery fabricated by the ex situ process were over ten times higher than those of a thin-film battery fabricated by the in situ process. The battery fabricated by ex situ process showed high capacity reduction because of the high resistance values. This result indicated that the cyclability of the battery strongly depended on the interfacial stability between the solid electrolyte and the cathode during intercalation and deintercalation of Li ions. Therefore, the in situ process holds promise for the high performance of all-solid-state thin-film batteries. 11 refs.