High-finesse cavities fabricated by buckling self-assembly of a-Si/SiO2 multilayers

Arrays of half-symmetric Fabry-Perot micro-cavities were fabricated by controlled formation of circular delamination buckles within a-Si/SiO(2) multilayers. Cavity height scales approximately linearly with diameter, in reasonable agreement with predictions based on elastic buckling theory. The measu...

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Bibliographic Details
Published inOptics express Vol. 19; no. 20; pp. 18903 - 18909
Main Authors Allen, T W, Silverstone, J, Ponnampalam, N, Olsen, T, Meldrum, A, DeCorby, R G
Format Journal Article
LanguageEnglish
Published United States 26.09.2011
Subjects
Computer Simulation
Equipment Design
Manufactured Materials - analysis
Models, Theoretical
Nanotechnology - methods
Optical Devices
Photons
Scattering, Radiation
Silicon - chemistry
Silicon Dioxide - chemistry
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Summary:Arrays of half-symmetric Fabry-Perot micro-cavities were fabricated by controlled formation of circular delamination buckles within a-Si/SiO(2) multilayers. Cavity height scales approximately linearly with diameter, in reasonable agreement with predictions based on elastic buckling theory. The measured finesse (F > 10(3)) and quality factors (Q > 10(4) in the 1550 nm range) are close to reflectance limited predictions, indicating that the cavities have low roughness and few defects. Degenerate Hermite-Gaussian and Laguerre-Gaussian modes were observed, suggesting a high degree of cylindrical symmetry. Given their silicon-based fabrication, these cavities hold promise as building blocks for integrated optical sensing systems.
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ISSN:1094-4087
DOI:10.1364/OE.19.018903