Fabrication of phase-change chalcogenide Ge2Sb2Te5 patterns by laser-induced forward transfer

• Published in: Optics express Vol. 19; no. 18; pp. 16975 - 16984
• Main Authors: Tseng, Ming Lun, Chen, Bo Han, Chu, Cheng Hung, Chang, Chia Min, Lin, Wei Chih, Chu, Nien-Nan, Mansuripur, Masud, Liu, Ai Qun, Tsai, Din Ping
• Format: Journal Article
• Language: English
• Published: United States 29.08.2011

Femtosecond laser pulses are focused on a thin film of Ge2Sb2Te5 phase-change material, and the transfer of the illuminated material to a nearby substrate is investigated. The size, shape, and phase-state of the fabricated pattern can be effectively controlled by the laser fluence and by the thickne...