大口径强激光光学元件超精密制造技术研究进展
惯性约束聚变高功率固体激光装置研制对大口径光学元件提出了全频段精度控制指标要求，以及高效率、批量化制造需求。本文围绕“超精密、确定性”强激光光学元件全流程制造方法，总结了近几年大口径强激光光学元件超精密制造技术取得的重要进展，重点介绍了单点金刚石超精密切削技术、非球面超精密数控磨削技术、确定性抛光技术等一系列关键技术，以及相关工艺及装备在强激光光学元件批量制造流程线中的应用情况。...
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| Published in | Guang Dian Gong Cheng = Opto-Electronic Engineering Vol. 47; no. 8; pp. 200135 - 13 |
|---|---|
| Main Authors | , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , |
| Format | Journal Article |
| Language | Chinese English |
| Published |
Chengdu
Editorial Office of Opto-Electronic Advances
15.08.2020
中国工程物理研究院激光聚变研究中心,四川 绵阳 621900 |
| Subjects | |
| Online Access | Get full text |
| ISSN | 1003-501X |
| DOI | 10.12086/oee.2020.200135 |
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| Abstract | 惯性约束聚变高功率固体激光装置研制对大口径光学元件提出了全频段精度控制指标要求，以及高效率、批量化制造需求。本文围绕“超精密、确定性”强激光光学元件全流程制造方法，总结了近几年大口径强激光光学元件超精密制造技术取得的重要进展，重点介绍了单点金刚石超精密切削技术、非球面超精密数控磨削技术、确定性抛光技术等一系列关键技术，以及相关工艺及装备在强激光光学元件批量制造流程线中的应用情况。 |
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| AbstractList | 惯性约束聚变高功率固体激光装置研制对大口径光学元件提出了全频段精度控制指标要求，以及高效率、批量化制造需求。本文围绕“超精密、确定性”强激光光学元件全流程制造方法，总结了近几年大口径强激光光学元件超精密制造技术取得的重要进展，重点介绍了单点金刚石超精密切削技术、非球面超精密数控磨削技术、确定性抛光技术等一系列关键技术，以及相关工艺及装备在强激光光学元件批量制造流程线中的应用情况。 TH74; 惯性约束聚变高功率固体激光装置研制对大口径光学元件提出了全频段精度控制指标要求,以及高效率、批量化制造需求.本文围绕"超精密、确定性"强激光光学元件全流程制造方法,总结了近几年大口径强激光光学元件超精密制造技术取得的重要进展,重点介绍了单点金刚石超精密切削技术、非球面超精密数控磨削技术、确定性抛光技术等一系列关键技术,以及相关工艺及装备在强激光光学元件批量制造流程线中的应用情况. |
| Author | Zhou, Lian Zhao, Shijie 许乔 Xu, Xi 安晨辉 Xie Ruiqing 赵世杰 Lei Xiangyang An Chenhui 谢瑞清 Chen, Xianhua 樊非 徐曦 Zhu, Yujie 邓文辉 周炼 Wang, Jian 汪圣飞 Xu, Qiao Wang Shengfei Zhong, Bo Liao Defeng 侯晶 钟波 王健 陈贤华 雷向阳 廖德锋 Deng Wenhui 朱玉洁 / Fan Fei Hou Jing |
| AuthorAffiliation | 中国工程物理研究院激光聚变研究中心,四川 绵阳 621900 |
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| Author_FL | Wang Jian Fan Fei Wang Shengfei Zhong Bo Liao Defeng Zhu Yujie Chen Xianhua Xie Ruiqing Lei Xiangyang An Chenhui Zhao Shijie Xu Xi Deng Wenhui Xu Qiao Zhou Lian Hou Jing |
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| Title | 大口径强激光光学元件超精密制造技术研究进展 |
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