Photostabilization : Illuminating photoresist treatment

Photostabilization has played an important role in photoresist treatment and semiconductor processing advancements over the last decade. A 28% increase in implant throughput by one user is one of many examples. With the introduction of deep ultraviolet photoresist in device production, photostabiliz...

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Bibliographic Details
Published inSemiconductor international Vol. 20; no. 8; pp. 161 - 174
Main Authors GILLESPIE, P, MOHONDRO, R, JONES, M. A, KRISA, W. L, ROMIG, T
Format Magazine Article
LanguageEnglish
Published Highlands Ranch, CO Cahners 01.07.1997
Reed Business Information, a division of Reed Elsevier, Inc
Subjects
Applied sciences
Electronics
Exact sciences and technology
Heat
Ion implantation
Manufacturing
Microelectronic fabrication (materials and surfaces technology)
Plasma etching
Processes
Productivity
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Semiconductors
Solvents
Temperature
Thermal energy
Ultraviolet radiation
Microelectronic fabrication
Ion implantation
Lithography
Stabilization
Plasma etching
Integrated circuit
Thermal stability
Photoresist
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Summary:Photostabilization has played an important role in photoresist treatment and semiconductor processing advancements over the last decade. A 28% increase in implant throughput by one user is one of many examples. With the introduction of deep ultraviolet photoresist in device production, photostabilization's role is now more critical than ever. Looking toward the future, photostabilization tools for processing 300 mm wafers and 0.18 micrometer device production are being developed. Early results from device manufacturers suggest that it may be essential to photostabilize 300 mm wafers to broaden the etch and implant process window for production.
ISSN:0163-3767