Behaviors of capacitive and Pirani vacuum gauges

• Published in: Vakuum in Forschung und Praxis : Zeitschrift für Vakuumtechnologie, Oberflèachen und Dünne Schichten Vol. 30; no. 5; pp. 39 - 44
• Main Authors: Zavarian, Ali Asghar, Arman, Ali, Ghotbi, S. M. Jamal, Korpi, Alireza Grayeli, Salehi, Maryam, Mardani, Mohsen, Hafezi, Fatemeh, Shafiekhani, Azizollah, Ţălu, Ştefan, Afghan, Ashkan Sepehr
• Format: Journal Article
• Language: English
• Published: Weinheim Wiley Subscription Services, Inc 01.10.2018
• Subjects: Barometers; Calibration; Deviation; Vacuum gages

Summary Knowing the exact pressure of the process has a great impact on the validity of the results, product quality, energy efficiency, and in some processes, on the security of work with the system. Hence, the calibration of the barometers and the accuracy of the readings should be taken seriously...