Integrated SEM/EDS particle analyzer automates inspection

Hitachi Science Systems Ltd., Tokyo, and Oxford Instruments, Oxfordshire, UK, have joined forces to produce an integrated particle analysis system. By incorporating a scanning electron microscope and an energy dispersive spectrometer, the automated S-3000N allows researchers to analyze up to 500 par...

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Bibliographic Details
Published inR & D : reading for the R & D community Vol. 42; no. 8; p. 27
Main Author Cecere, Paula
Format Magazine Article
LanguageEnglish
Published Highlands Ranch WTWH Media LLC 01.08.2000
Subjects
Analyzers
Atoms & subatomic particles
Automation
Classification
R&D
Research & development
Sensors
Software
User interface
United States > US
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Summary:Hitachi Science Systems Ltd., Tokyo, and Oxford Instruments, Oxfordshire, UK, have joined forces to produce an integrated particle analysis system. By incorporating a scanning electron microscope and an energy dispersive spectrometer, the automated S-3000N allows researchers to analyze up to 500 particles/hour.
Bibliography:content type line 24
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SourceType-Magazines-1
ISSN:0746-9179