A Large Scale Production Test of Thin Film BaxSr1-xTiO3 Microwave Phase Shifters Fabricated on LaAlO3 Substrates

• Published in: Integrated ferroelectrics Vol. 77; pp. 51 - 62
• Main Authors: Van Keuls, F W, Varaljay, N C, Mueller, C H, Alterovitz, S A, Miranda, F A, Romanofsky, R R
• Format: Journal Article
• Language: English
• Published: 01.01.2005

Many individual tunable ferroelectric-based microwave components have demonstrated excellent performance. However data on the production of many identical devices has been lacking. This paper will present data from NASA Glenn Research Center's fabrication of 822 phase shifters using commerciall...