A Large Scale Production Test of Thin Film BaxSr1-xTiO3 Microwave Phase Shifters Fabricated on LaAlO3 Substrates

Many individual tunable ferroelectric-based microwave components have demonstrated excellent performance. However data on the production of many identical devices has been lacking. This paper will present data from NASA Glenn Research Center's fabrication of 822 phase shifters using commerciall...

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Bibliographic Details
Published inIntegrated ferroelectrics Vol. 77; pp. 51 - 62
Main Authors Van Keuls, F W, Varaljay, N C, Mueller, C H, Alterovitz, S A, Miranda, F A, Romanofsky, R R
Format Journal Article
LanguageEnglish
Published 01.01.2005
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Summary:Many individual tunable ferroelectric-based microwave components have demonstrated excellent performance. However data on the production of many identical devices has been lacking. This paper will present data from NASA Glenn Research Center's fabrication of 822 phase shifters using commercially obtained pulsed laser deposited BaxSr1-xTiO3 (BST) thin films. These phase shifters of identical design were fabricated on 31 BST coated LaAlO3 wafers. Issues of phase shifter performance, repeatability, yield, and long term stability will be addressed. Phase shifter tunability and insertion losses will be compared with BST microstructural film characteristics and also with manufacturing induced physical variations in the electrodes.
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ISSN:1058-4587
DOI:10.1080/10584580500414069