Determination of amount of substance for nanometrethin deposits: consistency between XPS, RBS and XRF quantification

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Bibliographic Details
Published inSurface and interface analysis Vol. 35; no. 12; pp. 984 - 990
Main Authors MARTIN-CONCEPCION, A. I, YUBERO, F, ESPINOS, J. P, GARCIA-LOPEZ, J, TOUGAARD, S
Format Journal Article
LanguageEnglish
Published Chichester Wiley 01.12.2003
Subjects
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Structure and morphology; thickness
Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
XPS peak shape analysis
RBS
X ray fluorescence
IMFP
Film growth
Surface structure
Zinc oxides
surface quantitative analysis
ZnO
PECVD
nanostructure determination
Island structure
X-ray photoelectron spectra
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ISSN:0142-2421
1096-9918
DOI:10.1002/sia.1635