Titanium Carbide Obtained by Magnetron Sputtering of Graphite on Heated Titanium Substrate

• Published in: Journal of Nano- and Electronic Physics Vol. 9; no. 5
• Main Authors: Kaipoldayev, O E, Muradov, A D, Mukhametkarimov, Y S, Nemkayeva, R R, Baigarinova, G A, Aitzhanov, M B, Guseinov, N R
• Format: Journal Article
• Language: English; Russian; Ukrainian
• Published: Sumy Ukraine Sumy State University, Journal of Nano - and Electronic Physics 01.01.2017
• Subjects: Atomic structure; Diffraction; Energy dispersive X ray spectroscopy; Graphite; Magnetron sputtering; Photovoltaic cells; Raman spectroscopy; Spectroscopic analysis; Spectrum analysis; Substrates; Titanium carbide; X-ray diffraction
• ISSN: 2077-6772; 2306-4277
• DOI: 10.21272/jnep.9(5).05045

Titanium carbide was synthetized by sputtering graphite target on heated titanium substrate by magnetron sputtering process. The obtained samples were characterized by X-ray diffraction (XRD) analysis and Raman spectroscopy, the elemental analysis was made by Energy-dispersive X-ray spectroscopy (EDX). Titanium carbide (TiC) structure was obtained by deposition of sputtered carbon atoms and clusters to the resistively heated titanium substrate surface with temperatures 700 °C, 800 °C, 900 °C and 1000 °C. The XRD analysis showed that the formation of TiC structure is take place when the substrate is heated to 1000 °C. The Raman spectroscopy showed that when the incident power of laser is 100 % (35 mW) the structure is unstable in samples with the substrate temperatures 700 °C, 800 °C and 900 °C and the most stable titanium carbide structure is created when the substrate temperature is 1000 °C.