Thermoelectric properties of Zn4Sb3/CeFe(4-x)Co x Sb12 nano-layered superlattices modified by MeV Si ion beam

• Published in: Applied surface science Vol. 310; pp. 226 - 229
• Main Authors: Budak, S, Guner, S, Minamisawa, R A, Muntele, C I, Ila, D
• Format: Journal Article
• Language: English
• Published: 01.08.2014
• Subjects: Figure of merit; Ion beam assisted deposition; Ion bombardment; Multilayers; Nanostructure; Superlattices; Thermoelectricity; Thin films
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2014.04.026

We prepared multilayers of superlattice thin film system with 50 periodic alternating nano-layers of semiconducting half-Heusler beta -Zn4Sb3 and skutterudite CeFe2Co2Sb12 compound thin films using ion beam assisted deposition (IBAD) with Au layers deposited on both sides as metal contacts. The deposited multilayer thin films have alternating layers about 5nm thick. The total thickness of the multilayer system is 275nm. The superlattices were then bombarded by 5MeV Si ion at six different fluences to form nano-cluster structures. The film thicknesses and composition were monitored by Rutherford backscattering spectrometry (RBS) before and after MeV ion bombardment. We have measured the thermoelectric efficiency, Figure of Merit ZT, of the fabricated device by measuring the cross plane thermal conductivity by the 3rd harmonic (3 omega ) method, the cross plane Seebeck coefficient, and the electrical conductivity using the van der Pauw method before and after the MeV ion bombardments. We reached the remarkable thermoelectric Figure of Merit results at optimal fluences.