Development of scanning electron and x-ray microscope

We have developed a new type of microscope possessing a unique feature of observing both scanning electron and X-ray images under one unit. Unlike former X-ray microscopes using SEM [1, 2], this scanning electron and X-ray (SELX) microscope has a sample in vacuum, thus it enables one to observe a su...

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Bibliographic Details
Published inAIP conference proceedings Vol. 1696; no. 1
Main Authors Matsumura, Tomokazu, Hirano, Tomohiko, Suyama, Motohiro
Format Journal Article
LanguageEnglish
Published 28.01.2016
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Summary:We have developed a new type of microscope possessing a unique feature of observing both scanning electron and X-ray images under one unit. Unlike former X-ray microscopes using SEM [1, 2], this scanning electron and X-ray (SELX) microscope has a sample in vacuum, thus it enables one to observe a surface structure of a sample by SEM mode, to search the region of interest, and to observe an X-ray image which transmits the region. For the X-ray observation, we have been focusing on the soft X-ray region from 280 eV to 3 keV to observe some bio samples and soft materials. The resolutions of SEM and X-ray modes are 50 nm and 100 nm, respectively, at the electron energy of 7 keV.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.4937532