Development of a scanning transmission x-ray microscope for the beamline P04 at PETRA III DESY

We present a scanning transmission x-ray microscope (STXM) built on top of our existing modular platform for high resolution imaging experiments. This platform consists of up to three separate vacuum chambers and custom designed piezo stages. These piezo stages are able to move precisely in x-, y- a...

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Bibliographic Details
Published inAIP conference proceedings Vol. 1696; no. 1
Main Authors Andrianov, Konstantin, Ewald, Johannes, Nisius, Thomas, Lühl, Lars, Malzer, Wolfgang, Kanngießer, Birgit, Wilhein, Thomas
Format Journal Article
LanguageEnglish
Published 28.01.2016
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Summary:We present a scanning transmission x-ray microscope (STXM) built on top of our existing modular platform for high resolution imaging experiments. This platform consists of up to three separate vacuum chambers and custom designed piezo stages. These piezo stages are able to move precisely in x-, y- and z-direction, this makes it possible to adjust the components for different imaging modes. During recent experiments the endstation was operated mainly as a transmission x-ray microscope (TXM) [1, 2].
ISSN:0094-243X
1551-7616
DOI:10.1063/1.4937535