Depth Profile Analysis of New Materials in Hollow Cathode Discharge

In this review the possibility of hollow cathode discharge for depth profile analysis is demonstrated for several new materials: planar optical waveguides fabricated by Ag+-Na+ ion exchange process in glasses, SnO2 thin films for gas sensors modified by hexamethildisilazane after rapid thermal annea...

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Published inAIP conference proceedings Vol. 740; no. 1; pp. 373 - 384
Main Authors Djulgerova, R, Mihailov, V, Gencheva, V, Popova, L, Panchev, B, Michaylova, V, Szytula, A, Gondek, L, Dohnalik, T, Petrovic, Z Lj
Format Journal Article
LanguageEnglish
Published United States 01.01.2004
Subjects
ANNEALING
CERAMICS
CHEMICAL VAPOR DEPOSITION
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
DEPTH
GLASS
GLOW DISCHARGES
GOLD IONS
HOLLOW CATHODES
ION BEAMS
ION EXCHANGE
LAYERS
MATERIALS SCIENCE
PLASMA
SILVER
SILVER IONS
SODIUM
THIN FILMS
TUNGSTEN CARBIDES
WAVEGUIDES
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Summary:In this review the possibility of hollow cathode discharge for depth profile analysis is demonstrated for several new materials: planar optical waveguides fabricated by Ag+-Na+ ion exchange process in glasses, SnO2 thin films for gas sensors modified by hexamethildisilazane after rapid thermal annealing, W- and WC- CVD layers deposited on Co-metalloceramics and WO3- CVD thin films deposited on glass. The results are compared with different standard techniques.
Bibliography:SourceType-Scholarly Journals-2
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ObjectType-Conference Paper-1
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SourceType-Conference Papers & Proceedings-1
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ISBN:9780735402249
0735402248
ISSN:0094-243X
1551-7616
DOI:10.1063/1.1843521