Modelling of RF Discharge in Argon Plasma

• Published in: AIP conference proceedings Vol. 963; no. 2; pp. 1240 - 1243
• Main Authors: Jelinek, P, Virostko, P, Hubicka, Z, Bartos, P
• Format: Journal Article
• Language: English
• Published: United States 2007
• Subjects: ALGORITHMS; ARGON; ARGON IONS; CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; COMPUTERIZED SIMULATION; DEPOSITION; ELECTRIC POTENTIAL; ELECTRON COLLISIONS; ELECTRONS; HIGH-FREQUENCY DISCHARGES; PLASMA; PLASMA SIMULATION; STOCHASTIC PROCESSES; SUBSTRATES; THIN FILMS; WAVE FORMS

An one-dimensional hybrid model of RF discharge in low-temperature argon plasma is presented in our paper. The hybrid model consists of two parts-particle model which simulates fast electrons while fluid model simulates slow electrons and positive argon ions. In the particle model the positions and...