SiH₄-Ar혼합기체의 평균 에너지에 관한 연구

• Published in: 전기학회 논문지 P권, 55(2) Vol. 55P; no. 2; pp. 57 - 61
• Main Author: 金相南(Sang-Nam Kim)
• Format: Journal Article
• Language: Korean
• Published: 대한전기학회 01.06.2006
• Subjects: 전기공학; TOF(Time Of Flight Method) PT(Pulse Townsent Method); BEq(Boltzmann equation); SST(Steady State Townsent Method); MCS(Monte Carlo Simulation)
• ISSN: 1229-800X; 2586-7792

- This paper calculates and gives the analysis of mean energy in pure SiH4, Ar-SiH 4 mixture gases (SiH4- 0.5[%], 5[%]) over the range of E/N = 0.01～300[Td], P = 0.1, 1, 5.0 [Tor] by Monte Carlo the Backward prolongation method of the Boltzmann equation using computer simulation without using expensive equipment. The results have been obtained by using the electron collision cros sections by TOF, PT, SST sampling, compared with the experimental determined by the other author. It also proved the reliability of the electron collision cros sections and shows the practical values of computer simulation.The calculations of electron swarm parameters require the knowledge of several colision cross-sections of electron beam. Thus, published momentum transfer, ionization, vibration, attachment, electronic excitation, and disociation cross-sections of electrons for SiH4 and Ar, used. The differences of the transport coefficients of electrons in SiH4, mixtures of SiH4 and Ar, have been explained by the deduced energy distribution functions for electrons and the complete colision cros-sections for electrons.A two-term approximation of the Boltzmann equation analysis and Monte Carlo simulation have been used to study electron transport coeficients. KCI Citation Count: 0