In2O3-based micro gas sensor for detecting NOx gases
In this study, NO x micro gas sensors for monitoring the indoor atmosphere of automobile were fabricated using MEMS (microelectromechanical system) technology and a sol-gel process. The sensing electrode and micro heater were designed to have a co-planar typed structure in a Pt thin film layer. The...
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Published in | Electronic materials letters Vol. 10; no. 2; pp. 509 - 513 |
---|---|
Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Springer
The Korean Institute of Metals and Materials
01.03.2014
대한금속·재료학회 |
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Abstract | In this study, NO
x
micro gas sensors for monitoring the indoor atmosphere of automobile were fabricated using MEMS (microelectromechanical system) technology and a sol-gel process. The sensing electrode and micro heater were designed to have a co-planar typed structure in a Pt thin film layer. The thermal characteristics of a micro heater array were analyzed using a finite element method (FEM). The chip size of the gas sensor was approximately 2 mm × 2 mm. Indium oxide as a sensing material for NO
x
gas was synthesized by a sol-gel process with indium isopropoxide as a precursor. Field emission Scanning electron microscopy and x-ray diffraction showed that particle size of the synthesized In
2
O
3
was approximately 17–45 nm. The maximum gas sensitivity as the relative resistance (
R
s
=
R
gas
/
R
air
) was observed at 275°C with a value of 8.0 at 1 ppm NO
2
gas. The response (80% saturation) and recovery times were within 1 min. The sensing properties of NO
2
gas exhibited linear behavior with increasing gas concentration. The sensing mechanism of the gas sensor was explained by the variations in the electron depletion layers and the adsorption of gas molecules on the In
2
O
3
particle surface. These results suggest that in the future, MEMS-based gas sensors can be used as automotive-exhaust-gas sensors. |
---|---|
AbstractList | In this study, NO
x
micro gas sensors for monitoring the indoor atmosphere of automobile were fabricated using MEMS (microelectromechanical system) technology and a sol-gel process. The sensing electrode and micro heater were designed to have a co-planar typed structure in a Pt thin film layer. The thermal characteristics of a micro heater array were analyzed using a finite element method (FEM). The chip size of the gas sensor was approximately 2 mm × 2 mm. Indium oxide as a sensing material for NO
x
gas was synthesized by a sol-gel process with indium isopropoxide as a precursor. Field emission Scanning electron microscopy and x-ray diffraction showed that particle size of the synthesized In
2
O
3
was approximately 17–45 nm. The maximum gas sensitivity as the relative resistance (
R
s
=
R
gas
/
R
air
) was observed at 275°C with a value of 8.0 at 1 ppm NO
2
gas. The response (80% saturation) and recovery times were within 1 min. The sensing properties of NO
2
gas exhibited linear behavior with increasing gas concentration. The sensing mechanism of the gas sensor was explained by the variations in the electron depletion layers and the adsorption of gas molecules on the In
2
O
3
particle surface. These results suggest that in the future, MEMS-based gas sensors can be used as automotive-exhaust-gas sensors. In this study, NOx micro gas sensors for monitoring the indoor atmosphere of automobile were fabricated using MEMS (microelectromechanical system) technology and a sol-gel process. The sensing electrode and micro heater were designed to have a co-planar typed structure in a Pt thin film layer. The thermal characteristics of a micro heater array were analyzed using a finite element method (FEM). The chip size of the gas sensor was approximately 2 mm × 2 mm. Indium oxide as a sensing material for NOx gas was synthesized by a sol-gel process with indium isopropoxide as a precursor. Field emission Scanning electron microscopy and x-ray diffraction showed that particle size of the synthesized In2O3 was approximately 17 - 45 nm. The maximum gas sensitivity as the relative resistance (Rs = Rgas/Rair) was observed at 275°C with a value of 8.0 at 1 ppm NO2 gas. The response (80% saturation) and recovery times were within 1 min. The sensing properties of NO2 gas exhibited linear behavior with increasing gas concentration. The sensing mechanism of the gas sensor was explained by the variations in the electron depletion layers and the adsorption of gas molecules on the In2O3 particle surface. These results suggest that in the future, MEMS-based gas sensors can be used as automotive-exhaust-gas sensors. KCI Citation Count: 23 |
Author | Kim, Jung-Sik Song, In-Gyu Kim, Bum-Joon |
Author_xml | – sequence: 1 givenname: Bum-Joon surname: Kim fullname: Kim, Bum-Joon organization: Department of Material Science and Engineering, University of Seoul – sequence: 2 givenname: In-Gyu surname: Song fullname: Song, In-Gyu organization: Department of Material Science and Engineering, University of Seoul – sequence: 3 givenname: Jung-Sik surname: Kim fullname: Kim, Jung-Sik email: jskim@uos.ac.kr organization: Department of Material Science and Engineering, University of Seoul |
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References | LakemanC D EPayneD AMater. Chem. Phys.19943830510.1016/0254-0584(94)90207-0 SongJYaoQWuTShiXChenLElectron. Mater. Lett.2013970910.1007/s13391-013-3081-7 FranciosoLForleoACaponeSEpifaniMTaurinoA MSicilianoPSens. Actuators B: Chem.200611464610.1016/j.snb.2005.03.124 WadaKEgashiraMSens. Actuators B: Chem.19985314710.1016/S0925-4005(99)00013-1 CullityB DElements of x-ray Diffraction1978MAAddition-Wesley Pub. Co.101 SemancickSCavicchiRWheelerMTiffanyJPoirerGWaltonRSuehleJPanchapakesanBDeVoeDSens. Actuators B: Chem.20017757910.1016/S0925-4005(01)00695-5 KimB-JLeeH-JYoonJ-HKimJ-SSensor Lett.201210110.1166/sl.2012.2314 YangJLinCWangZLinJInorg. Chem.200645897310.1021/ic060934 KofstadPNonstoichiometry, Diffusion, and Electrical Conductivity in Binary Metal Oxides1983New YorkWiley192 KimS-DKimB-JYoonJ-HKimJ-SJ. Korean Phys. Soc.200751206910.3938/jkps.51.2069 KovacsG T AMalufN IPetersenK EProc. IEEE199986153610.1109/5.704259 OgawaHNishikawaMAbeAJ. Appl. Phys.198253444810.1063/1.331230 AstieSGueA MScheidELescouzeresLCassagnesASens. Actuators A: Phys.19986920510.1016/S0924-4247(98)00096-X SuP-GWuR-JNiehF-PTalanta20035966710.1016/S0039-9140(02)00582-9 MéniniPParretFGuerreroMSoulanticaKEradesLMaisonnaAChaudretBSens. Actuators B: Chem.200410311110.1016/j.snb.2004.04.103 FrauPSauvanMTrautweilerSNayralCEradesLMaisonnatAChaudretBSens. Actuators B: Chem.2001788310.1016/S0925-4005(01)00793-6 BakhshAMaqsoodAElectron. Mater. Lett.2012860510.1007/s13391-012-2083-1 MadouM JMorrisonS RChemical Sensing with Solid State Devices1989BostonAcademic Press13 BarboriniEVinatiSLeccardiMRepettoPBertoliniGRoratoOLorenzelliLDecarliMGuarnieriVDucatiCMilaniPJ. Micromechan. Microeng.200818501510.1088/0960-1317/18/5/055015 DecarliMLorenzelliLGuarnieriVBarboriniEVinatiSDucatiCMilaniPJ. Microelectron. Eng.200986124710.1016/j.mee.2008.11.036 GurloAIvanovskayaMPfauAWeimarUGöpelWThin Solid Films199730728810.1016/S0040-6090(97)00295-2 ChatelonJ PTerrierCBernsteinEBerjoanRRogerJ AThin Solid Film199424716210.1016/0040-6090(94)90794-3 FranciosoLRussoMTaurinoA MSicilianoPSens. Actuators B: Chem.200611915910.1016/j.snb.2005.12.006 |
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Snippet | In this study, NO
x
micro gas sensors for monitoring the indoor atmosphere of automobile were fabricated using MEMS (microelectromechanical system) technology... In this study, NOx micro gas sensors for monitoring the indoor atmosphere of automobile were fabricated using MEMS (microelectromechanical system) technology... |
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SubjectTerms | Characterization and Evaluation of Materials Chemistry and Materials Science Condensed Matter Physics Materials Science Nanotechnology Nanotechnology and Microengineering Optical and Electronic Materials 전자/정보통신공학 |
Title | In2O3-based micro gas sensor for detecting NOx gases |
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