Semiconductor nanopores formed by chemical vapor deposition of heteroepitaxial SiC films on SOI(100) substrates

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Bibliographic Details
Published inJournal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena Vol. 29
Main Authors Yoshifumi Ikoma, Yuta Nishino, Teruaki Motooka, Hafizal Yahaya, Hirofumi Sakita, Keiji Kuriyama
Format Journal Article
LanguageEnglish
Published American Vacuum Society 01.11.2011
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ISSN:2166-2746
2166-2754
DOI:10.1116/1.3646471