MoO3 thin film synthesis by chemical vapor transport of volatile MoO3(OH)2

Molybdenum oxide thin films with good adhesion and crystallinity were homogeneously deposited by the chemical vapor transport of MoO3(OH)2 and subsequent dehydration to the Mo oxide phase during hydrogen-reduction. This new deposition technique would be an effective deposition method for MoO3 thin f...

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Bibliographic Details
Published inJournal of Ceramic Processing Research, 11(1) pp. 52 - 55
Main Authors 오승탁, 김영도, Young Jung Lee, Chang Won Park, Dae-Gun Kim, William Thomas Nichols
Format Journal Article
LanguageEnglish
Published 세라믹연구소 01.02.2010
Subjects
재료공학
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Summary:Molybdenum oxide thin films with good adhesion and crystallinity were homogeneously deposited by the chemical vapor transport of MoO3(OH)2 and subsequent dehydration to the Mo oxide phase during hydrogen-reduction. This new deposition technique would be an effective deposition method for MoO3 thin films due to the simple, low-cost, large area deposition and eco-friendly process. The surface morphology dramatically changed by thermal annealing at different temperatures and a uniform ~1 μm thickness was obtained. The effect of the annealing temperature is discussed. KCI Citation Count: 13
Bibliography:G704-001111.2010.11.1.001
ISSN:1229-9162
2672-152X