반도체 생산설비 루츠형 진공펌프 계통에 대한 유동-구조 연성해석

• Published in: 한국유체기계학회 논문집 Vol. 16; no. 2; pp. 10 - 14
• Main Authors: 이찬(Chan Lee), 길현권(Hyun Gwon Kil), 김강천(Gang Chun Kim), 김준곤(Jun Gon Kim), 심재업(Jae Up Sim), 윤일중(Il Joong Yoon)
• Format: Journal Article
• Language: Korean
• Published: 한국유체기계학회 2013
• Subjects: 기계공학; Dynamic mesh(동적 격자); FEM(유한요소해석); CFD(전산유체역학); Clearance(간극); Vacuum pump(진공 펌프); Housing(하우징); Rotor(회전차)
• ISSN: 2287-9706
• DOI: 10.5293/kfma.2013.16.2.010

The present study conducts CFD analyses on the internal flow fields of roots type vacuum pumps of semiconductor fabrication facility, and the computed CFD results for internal pressure and temperature distributions are applied to structural analyses of the pumps. The coupled analysis results between flow and structure show that the deformation of pump structure is mainly resulted from the thermal expansion of gas in pump, and the deformed impeller and housing produce their severe contact and impact phenomena causing mechanical damage and fracture.