산소 분위기 열처리에 따른 ZnO 나노선의 상온 영역에서의 수소가스 검출 특성 향상

• Published in: Biuletyn Uniejowski Vol. 50; no. 2; pp. 125 - 130
• Main Author: 강우승(Wooseung Kang)
• Format: Journal Article
• Language: Korean
• Published: 한국표면공학회 2017
• Subjects: 기계공학; Annealing; Gas sensor; ZnO nanowires; Oxygen atmosphere
• ISSN: 1225-8024; 2299-8403; 2288-8403
• DOI: 10.5695/JKISE.2017.50.2.125

ZnO nanowires were synthesized and annealed at various temperatures of $500-800^{\circ}C$ in oxygen atmosphere to investigate hydrogen gas sensing properties. The diameter and length of the synthesized ZnO nanowires were approximately 50-100 nm and a few $10s\;{\mu}m$, respectively. $H_2$ gas sensing performance of the ZnO nanowires sensor was measured with electrical resistance changes caused by $H_2$ gas with a concentration of 0.1-2.0%. The response of ZnO nanowires at room temperature to 2.0% $H_2$ gas is found to be two times enhanced by annealing process in $O_2$ atmosphere at $800^{\circ}C$. In the current study, the effect of heat treatment in $O_2$ atmosphere on the gas sensing performance of ZnO nanowires was studied. And the underlying mechanism for the sensing improvement of the ZnO nanowires was also discussed.