RF 스퍼터링과 이온소스 복합방식에 의한 플라스틱사출금형(SKD11)의 DLC막 응용

• Published in: Biuletyn Uniejowski Vol. 42; no. 4; pp. 173 - 178
• Main Authors: 김미선(Mi-Seon Kim), 홍성필(Sung-Pill Hong)
• Format: Journal Article
• Language: Korean
• Published: 한국표면공학회 2009
• Subjects: 기계공학; Friction coefficient; DLC; RF sputtering; Raman spectroscopy; Adhesion
• ISSN: 1225-8024; 2299-8403; 2288-8403

DLC film was synthesized on plastic injection mold(SKD11, $30\;mm\;{\times}\;19\;mm\;{\times}\;0.5\;mm$) and Si(100) wafer for 2 h at $130^{\circ}C$ under 6 mTorr using hybrid method of rf sputtering and ion source. The obtained film was analysed by Raman spectroscopy, AFM, TEM, Nano indenter and scratch tester, etc. The film was defined as an amorphous phase. In the Raman spectrum, broad peak of $sp^2$-bonded carbon attributed to graphite at $1550\;cm^{-1}$ were observed, and the ratio of ID($sp^3$ diamond intensity)/IG($sp^2$ graphite intensity) was approximately 0.54. The adhesion of DLC film was more than 80 N with scratch tester when $0.2\;{\mu}m$ thickness Cr was coated as interlayer. The micro-hardness was distributed at 35~37 GPa. The friction coefficient was 0.02~0.07, and surface roughness(Ra) was 0.34~1.64 nm. The lifetime of DLC coated plastic injection mold using as a connector part in computer was more than 2 times of non-coated mold.