DBD 전극구조에서의 He 가스 글로우방전 특성연구

• Published in: 전기학회 논문지 P권, 67(4) Vol. 67P; no. 4; pp. 214 - 220
• Main Author: 소순열(Soon-Youl So)
• Format: Journal Article
• Language: Korean
• Published: 대한전기학회 2018
• Subjects: 전기공학; He gas; Glow discharge; Fluid model; Dielectric Barrier discharge
• ISSN: 1229-800X; 2586-7792

Light sources induced by gas discharge using rare gases have been widely used in the thin film deposition, the surface modification and the polymer etching. A dielectric barrier discharge (DBD) has been developed in order to consistently emit light and control the wavelength of the emission light. However, much research on the characteristics of the movement of discharge particles is required to improve the efficiency of the light lamp and the life-time of the light apparatus in detail. In this paper, we developed a He DBD discharge simulation tool and investigated the characteristics of discharge particles which were electrons, two positive ions ($He^+$, $He_2^+$) and 5 excited particles ($He^*(1S)$, $He^*(3S)$, $He^*$, $He^{**}$, $He^{***}$). The discharge currents showed the transition from pulse mode to continuous mode with the increase of power. With the accumulated charges on the barrier walls, the discharge current was rapidly increased and caused oscillation of the discharge voltage. As the gas pressure increased, $He_2^+$ and $He^*(3S)$ became the dominant activated particles. The input power was mostly consumed by electrons and $He_2^+$ ion. And the change curve showed that power consumption by electrons increased more with gas pressure than with source voltage or frequency.