DC 마그네트론 스퍼터로 증착한 flexible OLED용 IZO 박막의 기계적 특성과 투습특성에 미치는 반응성 가스 첨가의 효과

• Published in: Biuletyn Uniejowski Vol. 40; no. 6; pp. 245 - 249
• Main Authors: 천고은(Ko-Eun Cheon), 이동엽(Dong-Yeop Lee), 조영래(Young-Rae Cho), 송풍근(Pung-Keun Song)
• Format: Journal Article
• Language: Korean
• Published: 한국표면공학회 2007
• Subjects: 기계공학; TCO; OLED; Mechanical Property; DC magnetron sputtering; IZO; Bending test; Water permeability; Mechanical property
• ISSN: 1225-8024; 2299-8403; 2288-8403

Amorphous IZO films were deposited on PET substrate by DC magnetron sputtering without substrate heating. In order to investigate effect of reactive gas addition on film properties, 0.2-0.4% of $H_2$ or $O_2$ gas was introduced during the deposition. Deposited IZO films were evaluated with mechanical property, electrical property, and water permeability. In the case of $H_2$ gas addition, mechanical property showed clear degradation compared to $O_2$ gas. In the case of $O_2$ gas, water permeability of the IZO film was increased compared to $H_2$ gas which could be attributed to the low adhesion of the film caused by bombardment of high energy negative oxygen ion. As a result, it is confirmed that water permeability of the film could be strongly affected by adhesion of the film.