다공성 스테인리스 강 지지체의 표면개질에 따른 팔라듐-은 합금 수소 분리막의 수소 투과 선택도의 변화

• Published in: Biuletyn Uniejowski Vol. 49; no. 3; pp. 286 - 300
• Main Authors: 김낙천(Nak-Cheon Kim), 김세홍(Se-Hong Kim), 이진범(Jin-Beum Lee), 김현희(Hyun-Hee Kim), 양지혜(Ji-Hye Yang), 김동원(Dong-Won Kim)
• Format: Journal Article
• Language: Korean
• Published: 한국표면공학회 2016
• Subjects: 기계공학; Perm-selectivity; Pd-Ag alloy hydrogen membrane; Porous stainless steel support; Sputter multideposition; Surface treatment; Sputter multi-deposition
• ISSN: 1225-8024; 2299-8403; 2288-8403
• DOI: 10.5695/JKISE.2016.49.3.286

Pd-Ag alloy membranes have attracted a great deal of attention for their use in hydrogen purification and separation due to their high theoretical permeability, infinite selectivity and chemical compatibility with hydro-carbon containing gas streams. For commercial application, Pd-based membranes for hydrogen purification and separation need not only a high perm-selectivity but also a stable long-term durability. However, it has been difficult to fabricate thin, dense Pd-Ag alloy membranes on a porous stainless steel metal support with surface pores free and a stable diffusion barrier for preventing metallic diffusion from the porous stainless steel support. In this study, thin Pd-Ag alloy membranes were prepared by advanced Pd/Ag/Pd/Ag/Pd multi-layer sputter deposition on the modified porous stainless steel support using rough polishing/$ZrO_2$ powder filling and micro-polishing surface treatment, and following Ag up-filling heat treatment. Because the modified Pd-Ag alloy membranes using rough polishing/$ZrO_2$ powder filling method demonstrate high hydrogen permeability as well as diffusion barrier efficiency, it leads to the performance improvement in hydrogen perm-selectivity. Our membranes, therefore, are expected to be applicable to industrial fields for hydrogen purification and separation owing to enhanced functionality, durability and metal support/Pd alloy film integration.