P(VDF-TrFE) 유기 박막의 제조와 압전특성에 관한 연구

• Published in: 전기학회 논문지 P권, 57(4) Vol. 57P; no. 4; pp. 395 - 399
• Main Author: 朴修弘(Su-Hong Park)
• Format: Journal Article
• Language: Korean
• Published: 대한전기학회 2008
• Subjects: 전기공학; Substrate Temperature; Piezoelectric Coefficient; Molecular Structure; Organic Thin Films; P(VDF-TrFE)
• ISSN: 1229-800X; 2586-7792

The purpose of this paper is to investigate the fabrication of P(VDF-TrFE) organic thin films through the vapor deposition method and the piezoelectric properties of the organic thin films thus produced. Vapor deposition was performed under the following conditions: the working temperature, and the pressure of reaction chamber were $300^{\circ}C$, and $2.0{\times}10^{-5}$ Torr, respectively. The molecular structure and crystallinity of the evaporated organic thin films were evaluated by using a FT-IR (Fourier-Transform Infrared spectroscopy) and XRD (X-ray diffractometry), The results showed that crystallinity increased with an increase in the substrate temperature. When the P(VDF-TrFE) organic thin films were fabricated by increasing the substrate temperature, its piezoelectric coefficient($d_{33}$) increased.