ZnO/Ag Multilayer의 투과율과 전도성에 관한 연구

• Published in: Han-guk haeyang gonghak hoeji (Online) Vol. 25; no. 1; pp. 39 - 43
• Main Authors: 김윤해(Yun-hae Kim), 김도완(Do-wan Kim), 무라카미 리이치(Ri-Ichi Murakami), 문경만(Kyung-man Moon), 이성열(Sung-Yul Lee)
• Format: Journal Article
• Language: Korean
• Published: 한국해양공학회 2011
• Subjects: 해양공학; Transparent conducting oxide(TCO) 투명전도막; Transmittance 투과율; Surface plasmon resonance(SPR) 표면 플라즈몬 공명; Surface plasmon plaritons(SPP) 표면 플라즈몬 플라리톤
• ISSN: 1225-0767; 2287-6715

This study has lowered the specific resistance by coating a thin film layer of Ag, playing the role of the electron donor on the ZnO that is used usefully for the transparent conductive oxides. Presently, this study has examined the transmittance and electric characteristics according to the thickness of the Ag thin film layer. Also, this study has observed the transmittance and electric characteristics according to the uppermost ZnO thin film layer of ZnO/Ag/ZnO symmetric film and has conducted the theoretical investigation. In order to observe the transmittance and electric characteristics according to the thickness of the Ag thin film layer and the uppermost ZnO thin film layer, this study conducted the film deposition at room temperature while making use of the DC magnetron sputtering system. In order to see the changes in the thickness of the Ag thin film layer, this study coated a thin film while increasing by 4nm; and, in order to see the changes in the thickness of uppermost ZnO thin film layer, it performed the thin film coating by increasing by 5nm. From the experimental result, the researchers observed that the best transmittance could be obtained when the thickness of the Ag thin film layer was 8nm, but the resistance and mobility increased as the thickness got larger. On the other hand, when the thickness of the uppermost ZnO thin film layer was 20nm, the experiment yielded the best transmittance with excellent electric characteristics. Also, when compared the ZnO/Ag asymmetric film with the ZnO/Ag/ZnO symmetric film, the ZnO/Ag asymmetric film showed better transmittance and electric characteristics.