저항가열원에 의한 물질의 증발특성(Ⅰ)

The evaporation characteristics of Ag, Al, Au, Cr. Cu, In, Mg, Mn, Pb, Pd, Si, SiO, Sn, Ti and Zn with the various resistive heating sources have been studied. The employed sources are refractory metal (Mo, Ta and W) boats, W-wire, ceramic (usually Al2O3)-coated and -barriered refractory metal boats...

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Published inBiuletyn Uniejowski Vol. 24; no. 1; pp. 25 - 30
Main Authors 정재인(Jae-In Jeong), 임병문(Byung-Moon Lim), 문종호(Jong-Ho Moon), 홍재화(Jae-Hwa Hong), 강정수(Jeong-Soo Kang), 이영백(Young-Pak Lee)
Format Journal Article
LanguageKorean
Published 한국표면공학회 1991
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Summary:The evaporation characteristics of Ag, Al, Au, Cr. Cu, In, Mg, Mn, Pb, Pd, Si, SiO, Sn, Ti and Zn with the various resistive heating sources have been studied. The employed sources are refractory metal (Mo, Ta and W) boats, W-wire, ceramic (usually Al2O3)-coated and -barriered refractory metal boats, and special boats such as baffled boats and intermetallic boats (nitride compound and graphite). We investigated the melting mode, evaporation rate at a specific power, and lifetime of the sources. A special boat holder is also discussed which is needed to cool the sources at a large heat capacity.
Bibliography:KISTI1.1003/JNL.JAKO199111920549289
ISSN:1225-8024
2299-8403