Planarization Techniques

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Bibliographic Details
Published inHandbook of Multilevel Metallization for Integrated Circuits p. 1
Main Authors Tracy, Clarence J, Wilson, Syd R, Freeman Jr., John L
Format Book Chapter
LanguageEnglish
Published United States William Andrew Publishing/Noyes 1993
Elsevier Science & Technology Books
Subjects
Electronics & Semiconductors
Manufacture & Processing
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ISBN:9780815513407
0815513402