Design of Polycrystalline 3C-SiC Micro Beam Resonators with Corrugation

• Published in: Transactions on electrical and electronic materials Vol. 9; no. 5; pp. 193 - 197
• Main Authors: Chung, Gwiy-Sang, Nhan, Nguyen Duong The, Thach, Phan Duy
• Format: Journal Article
• Language: Korean
• Published: 한국전기전자재료학회 25.10.2008
• Subjects: 3C-SiC; Corrugation; Resonant frequency; Resonator; Resonator; Corrugation; 3C-SiC; Resonant frequency
• ISSN: 1229-7607; 2092-7592

On the purpose of increasing resonant frequency without sacrificing quality factor as well as much decreasing dimensions, corrugated micro beam resonator based on polycrystalline 3C-SiC films is the applicable solution. In this work, appropriate corrugated structure is suggested to increase resonant frequency of resonators. Micro beam resonators based on 3C-SiC films which have a two-side corrugation along the length of beams were simulated by finite element method and compared to a same-size flat rectangular. With the dimension of 36x12x0.5 ${\mu}m^{3}$, the flat cantilever has resonant frequency of 746 kHz. Meanwhile, with this size but corrugation width of 6 ${\mu}m$ and depth of 0.4 ${\mu}m$, the corrugated cantilever reaches the resonant frequency at 1.252 MHz.