Formation of the Amorphous Thin Films by the Vacuum Deposition
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Published in | Oyo Buturi Vol. 45; no. 12; pp. 1165 - 1171 |
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Main Authors | , |
Format | Journal Article |
Language | Japanese |
Published |
The Japan Society of Applied Physics
10.12.1976
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Online Access | Get full text |
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ISSN: | 0369-8009 2188-2290 |
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DOI: | 10.11470/oubutsu1932.45.1165 |