Mechanisms of metal and particle adhesion onto a silicon surface in a cleaning solution and in a new cleaning process

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Bibliographic Details
Published inOyo Buturi Vol. 66; no. 12; pp. 1304 - 1310
Main Author UEMURA, Kenichi
Format Journal Article
LanguageJapanese
Published The Japan Society of Applied Physics 10.12.1997
Subjects
band
colloid
DLVO theory
electrochemical impedance
metal
ozone chelate
particle
rest-potential
silicon
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ISSN:0369-8009
2188-2290
DOI:10.11470/oubutsu1932.66.1304