Multi-Axis Resonant Filter Design using Frequency Response Data applied to Industrial Scan Stage

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Bibliographic Details
Published inIEEE/ASME Transactions on Mechatronics Vol. 29; pp. 2867 - 2876
Main Authors Masahiro Mae, Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata
Format Journal Article
LanguageJapanese
Published Institute of Electrical and Electronics Engineers (IEEE) 01.08.2024
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ISSN:1083-4435
1941-014X
DOI:10.1109/tmech.2024.3402555