EFFECTS OF OXYGEN VACANCY DIFFUSION ON LEAKAGE CHARACTERISTICS OF Pt/(Ba0.5Sr0.5)TiO3/Pt CAPACITOR

Authors investigated leakage characteristics of Pt/(Ba0.5Sr0.5)TiO3(BST)/Pt capacitors by measuring current-voltage characteristics during annealing in vacuum and atmosphere. Built-in electric fields (Ei) generated at Pt/BST interfaces are derived from analysis of the leakage currents based on the S...

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Published inJpn.J.Appl.Phys ,Part 2. Vol. 39, no. 5A, pp. L416-L419. 2000 Vol. 39; no. 5A; pp. L416 - L419
Main Authors Maruno, S, Murao, T, Kuroiwa, T, Mikami, N, Tomikawa, A, Nagata, M
Format Journal Article
LanguageEnglish
Published 2000
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Summary:Authors investigated leakage characteristics of Pt/(Ba0.5Sr0.5)TiO3(BST)/Pt capacitors by measuring current-voltage characteristics during annealing in vacuum and atmosphere. Built-in electric fields (Ei) generated at Pt/BST interfaces are derived from analysis of the leakage currents based on the Schottky conduction mechanism. Ei varies in proportion to the square root of annealing time. In addition, authors found that an external electric field applied during annealing in vacuum induces asymmetric degradation in the leakage characteristics at the top and bottom Pt/BST interfaces. Such behavior in the leakage characteristics is interpreted in terms of the diffusion of O vacancies at the interfaces. Diffusivity of O vacancies is determined from the Ei - square root of annealing time curves. 10 refs.
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ISSN:0021-4922
DOI:10.1143/jjap.39.L416