垂直磁気記録媒体用CoPt基合金-酸化物グラニュラー薄膜の柱状成長臨界膜厚の評価

• Published in: Journal of the Vacuum Society of Japan Vol. 60; no. 3; pp. 112 - 118
• Main Authors: 斉藤, 伸, 佐々木, 晋五, 佐々木, 有三
• Format: Journal Article
• Language: Japanese
• Published: Tokyo 一般社団法人 日本真空学会 2017; Japan Science and Technology Agency
• Subjects: Granular materials; Granular media; Magnetic anisotropy; Magnetic properties; Magnetic recording; Rapid prototyping; Silicon dioxide; Thickness
• ISSN: 1882-2398; 1882-4749
• DOI: 10.3131/jvsj2.60.112

A method for quantitatively determining the critical thickness, dcrit., for columnar growth of a CoPtCr-SiO2 granular layer was evaluated. The value of dcrit. can be determined from a plot of the perpendicular magnetic anisotropy energy (Ku) of the layer, Ku×dmag., versus the layer thickness, dmag.. The value of dcrit. reflects the structural uniformity of the layer in the thickness direction, and can be used as an index for choosing suitable deposition conditions and the material for the granular layer. Using the proposed method, columnar growth structures can be analyzed by evaluating their magnetic properties and layer thickness without observing cross-sectional TEM images. This inexpensive and simple method can potentially be used to characterize columnar growth structures on the nanometer scale.