ナノチャネルを有する強誘電体ゲート薄膜トランジスタの作製とその電気特性評価

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Published inJournal of the Vacuum Society of Japan Vol. 56; no. 5; pp. 172 - 175
Main Authors 野村, 侑平, 吉村, 武, 藤村, 紀文
Format Journal Article
LanguageJapanese
Published 一般社団法人 日本真空学会 2013
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Author 野村, 侑平
藤村, 紀文
吉村, 武
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  organization: 大阪府立大学大学院工学研究科
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  fullname: 藤村, 紀文
  organization: 大阪府立大学大学院工学研究科
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Title ナノチャネルを有する強誘電体ゲート薄膜トランジスタの作製とその電気特性評価
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