IN-SITU ELLIPSOMETRIC OBSERVATIONS OF THICKNESS CHANGE IN THE LAYERS OF Ag/A-As2S3 FILM SYSTEM WITH PROGRESSION OF PHOTODOPING

The phenomenon of Ag-photodoping in an amorphous As2S3 film was examined by an ellipsometric method. The observed ellipsometric parameters Y and D were fitted using multilayer models. It was observed that the thickness of each layer of the Ag, Ag-doped As2S3 and As2S3 system showed a timed-dependenc...

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Published inJpn.J.Appl.Phys ,Part 1. Vol. 39, no. 2A, pp. 509-510. 2000 Vol. 39; no. 2A; pp. 509 - 510
Main Authors Murakami, Y, Ogawa, T, Wakaki, M, Kawabata, S
Format Journal Article
LanguageEnglish
Published 2000
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Summary:The phenomenon of Ag-photodoping in an amorphous As2S3 film was examined by an ellipsometric method. The observed ellipsometric parameters Y and D were fitted using multilayer models. It was observed that the thickness of each layer of the Ag, Ag-doped As2S3 and As2S3 system showed a timed-dependency. From these behaviors, the main features of photodoping in a double-layer, Ag/As2S3 were confirmed. The composition of Ag-doped As2S3 layer was estimated to be Ag2.6As2S3 from the amounts of consumed Ag and As2S3. 11 refs.
Bibliography:ObjectType-Article-2
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ISSN:0021-4922
DOI:10.1143/jjap.39.509