イオンビーム照射ポリフッ化ビニリデン薄膜のエッチング挙動— エッチング前処理・照射イオン効果の検討

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Published in高分子論文集 Vol. 65; no. 3; pp. 273 - 276
Main Authors 高橋, 周一, 前川, 康成, 越川, 博, 浅野, 雅春, 八巻, 徹也, 長谷川, 伸
Format Journal Article
LanguageJapanese
Published 公益社団法人 高分子学会 2008
Online AccessGet full text
ISSN0386-2186
1881-5685
DOI10.1295/koron.65.273

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Author 前川, 康成
越川, 博
長谷川, 伸
浅野, 雅春
八巻, 徹也
高橋, 周一
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  fullname: 浅野, 雅春
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12) J. F. Ziegler, J. P. Biersack, and U. Littmack, “The Stopping Range of Ions in Solids”, Pergamon Press, New York (1985).
References_xml – reference: 1) R. Spohr, “Ion Tracks and Microtechnology: Principles and Applications”, Vieweg Verlag, Wiesbaden (1990).
– reference: 9) C.-D. Zhao, P. Vater, and R. Brandt, Nucl. Tracks Radiat. Meas., 19, 829 (1991).
– reference: 11) Y. Suzuki, T. Yamaki, H. Koshikawa, M. Asano, K.-O. Voss, R. Neumann, and M. Yoshida, Nucl. Instrum. Methods Phys. Res. Sect. B, 260, 693 (2007).
– reference: 5) S. P. Tretyakova, V. V. Shirkova, N. B. Khitrova, and C. Borcea, Int. J. Radiat. Appl. Instrum. Part D, 12, 75 (1986).
– reference: 4) H. Kohli, C. C. Harrel, Z. Cao, R. Gasparac, W. Tan, and C. R. Martin, Science, 305, 984 (2004).
– reference: 7) E. Ferain and R. Legras, Nucl. Instrum. Methods Phys. Res. Sect. B, 84, 331 (1994).
– reference: 8) C. Daubresse, T. Sergent-Engelen, E. Ferain, Y.-J. Schneider, and R. Legras, Nucl. Instrum. Methods Phys. Res. Sect. B, 105, 126 (2005).
– reference: 6) M. Grasselli and N. Betz, Nucl. Instrum. Methods Phys. Res. Sect. B, 236, 501 (2005).
– reference: 12) J. F. Ziegler, J. P. Biersack, and U. Littmack, “The Stopping Range of Ions in Solids”, Pergamon Press, New York (1985).
– reference: 2) T. Yamaki, Y. Kozone, A. Hiroki, M. Asano, H. Kubota, and M. Yoshida, ECS Transactions, 3, 103 (2006).
– reference: 3) T. Yamaki, Y. Kozone, A. Hiroki, K. Hosoi, M. Asano, H. Kubota, and M. Yoshida, Electrochemistry, 75, 175 (2007).
– reference: 10) M. S. Shoichet and T. J. McCarthy, Macromolecules, 24, 982 (1991).
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Title イオンビーム照射ポリフッ化ビニリデン薄膜のエッチング挙動— エッチング前処理・照射イオン効果の検討
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