透過電子顕微鏡法の最近の動向とグリーンナノテクノロジーへの応用

• Published in: Journal of MMIJ Vol. 133; no. 3; pp. 58 - 67
• Main Authors: 友清, 芳二, 松村, 晶
• Format: Journal Article
• Language: Japanese
• Published: Tokyo 一般社団法人 資源・素材学会 01.01.2017; Japan Science and Technology Agency
• Subjects: Atomic bonding; Chemical bonds; Chemical composition; Clean energy; Crystallography; Electrons; Emission analysis; Energy; Field emission; Gas pressure; Image quality; Image resolution; Imaging techniques; Nanotechnology; R&D; Research & development; Scanning transmission electron microscopy; Sustainable development; Transmission electron microscopy; Water conservation; グリーンテクノロジー; ナノテクノロジー; 分析電子顕微鏡; 微細構造解析; 走査透過電子顕微鏡; 透過電子顕微鏡
• ISSN: 1881-6118; 1884-0450
• DOI: 10.2473/journalofmmij.133.58

Transmission electron microscopy has been playing an important role in research and development of nanotechnology which is common and fundamental in various fields of science and technology such as energy, environmental sciences, information and telecommunications, and life sciences and etc. A transmission electron microscope (TEM) provides us with crystallographic information and positional information from a local area of specimen. Furthermore information on local chemical composition and atomic bonding state is obtained provided the TEM is equipped with an X-ray energy dispersive spectrometer (XEDS) and an electron energy loss spectrometer (EELS). The image resolution and special resolution of elemental analysis have been improved to an atomic level together with the development of an analytical TEM that has a field emission gun, an aberration corrector and a function of scanning TEM (STEM). It has been possible to extract high quality and various information on substance and materials, owing to the development of electron detectors and imaging techniques of STEM. Objects of TEM observation have been widely spread after the development of related techniques such as preparation of TEM samples and controlling of specimen environment (heating, cooling, gas pressure, stress application etc.). We introduce recent trend of transmission electron microscopy and demonstrate some applications to green nanotechnology which is closely related to development of renewable energy, energy saving, energy storing, saving of rear resource, removal of harmful substance from air and water and so on.