Trajectory Tracking Control and Error Analysis of Three-Link Semiconductor Wafer Transfer Robot Arm Driven with Stepping Motors

• Published in: Transactions of the Japan Society of Mechanical Engineers Series C Vol. 72; no. 719; pp. 2008 - 2014
• Main Authors: ABE, Keiichi, KOJIMA, Hiroyuki, KUWANO, Yoshihumi, CHIGIRA, Hideyuki, KIKUCHI, Noriyoshi
• Format: Journal Article
• Language: Japanese
• Published: The Japan Society of Mechanical Engineers 2006
• Subjects: Actuator; Error Analysis; Manipulator; Measurement; Mechatronics and Robotics; Motion Control; Semiconductor Wafer Transfer Robot; Stepping Motor; Trajectory Tracking Control
• ISSN: 0387-5024; 1884-8354
• DOI: 10.1299/kikaic.72.2008

This study deals with the trajectory tracking control of a three-degree-of-freedom semiconductor wafer transfer robot arm driven hybrid stepping motors. The desired trajectory of the end of the robot is set to be a straight line, and the desired posture of the third link is constant. The high-precision control of the hybrid stepping motor is executed with the microstep drive technique. The desired joint angle is obtained by the microstep technique and the trajectory planning method based on the inverse kinematics. From the numerical calculation results and the experimental results, it is confirmed that the trajectory tracking control of the three-degree-of-freedom semiconductor wafer transfer robot arm can be successfully executed by the present high-precision control system with microstep drive technique. Furthermore, the error of the end of the robot arm is theoretically investigated.