Development of a Thin-Film Strain Sensor with Reduced Pressure, Temperature and Transverse Sensitivity

In order to measure correctly the strain distribution on sliding surfaces of machines, the strain sensor should react only to the strain to be measured. Thus, the sensor should be insensitive not only to pressure, temperature, transverse strain and must be made to meet requirements regarding small s...

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Bibliographic Details
Published inTransactions of the Japan Society of Mechanical Engineers Series C Vol. 69; no. 677; pp. 258 - 263
Main Authors MIHARA, Yuji, SOMEYA, Tsuneo
Format Journal Article
LanguageJapanese
Published The Japan Society of Mechanical Engineers 2003
Subjects
Experimental Stress Analysis
Gauge Factor
Internal Combustion Engine
Measurement
Pressure Sensitivity
Sensor
Strain Gauge
Temperature Sensitivity
Thin Film
Transverse Sensitivity
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Summary:In order to measure correctly the strain distribution on sliding surfaces of machines, the strain sensor should react only to the strain to be measured. Thus, the sensor should be insensitive not only to pressure, temperature, transverse strain and must be made to meet requirements regarding small size. In this research, we developed a small sputtered thin-film strain sensor with negligible sensitivity to pressure and temperature by properly proportioning the sensor constituents with a Ni-Cr-Al alloy. In addition, by implementing an L-shaped sensor in an appropriate size, a transverse strain sensitivity of zero was achieved.
ISSN:0387-5024
1884-8354
DOI:10.1299/kikaic.69.258