VHF駆動によるマイクロプラズマの生成技術とマイクロ化学分析システムへの応用

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Published in応用物理 Vol. 70; no. 4; pp. 452 - 453
Main Authors 堀池, 靖浩, 一木, 隆範
Format Journal Article
LanguageJapanese
Published 公益社団法人 応用物理学会 2001
Online AccessGet full text
ISSN0369-8009
2188-2290
DOI10.11470/oubutsu1932.70.452

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Author 堀池, 靖浩
一木, 隆範
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References 1) 例えば, A, Manz and H. Becker, Eds,: Microsystem Technology in Chemistry and Life Sciences (Springer-Verlag, Berlin, Germany, 1998).
5) J. C. T. Eijkel, et al.: Anal. Chem. 71, 2600 (1999).
2) J. W. Olesik, et al.: Anal. Chem. 67, 1 (1995).
4) E. Mei, et al.: Anal. Chem. 69, 2187 (1997).
8) Y. Yin: J. Messier and J. Hopwood: IEEE Trans. Plasma Sci. 27, 1516 (1999).
7) U. Engel, et al.: Anal. Chem. 72, 193 (2000).
6) J. C. T. Eijkel, et al.: Micro Total Analysis Systems 2000 (ed. A. van den Berg, et al. Kluwer Academic Publishers, Netherlands), p. 591 (2000).
3) Y. Liu, et al.: Anal. Chem. 67, 2020 (1995).
9) T. Ichiki, et al.: Abstr. 47th Int. Symp. Am. Vac. Soc. p. 186 (Boston, 2000).
References_xml – reference: 9) T. Ichiki, et al.: Abstr. 47th Int. Symp. Am. Vac. Soc. p. 186 (Boston, 2000).
– reference: 2) J. W. Olesik, et al.: Anal. Chem. 67, 1 (1995).
– reference: 5) J. C. T. Eijkel, et al.: Anal. Chem. 71, 2600 (1999).
– reference: 1) 例えば, A, Manz and H. Becker, Eds,: Microsystem Technology in Chemistry and Life Sciences (Springer-Verlag, Berlin, Germany, 1998).
– reference: 4) E. Mei, et al.: Anal. Chem. 69, 2187 (1997).
– reference: 3) Y. Liu, et al.: Anal. Chem. 67, 2020 (1995).
– reference: 6) J. C. T. Eijkel, et al.: Micro Total Analysis Systems 2000 (ed. A. van den Berg, et al. Kluwer Academic Publishers, Netherlands), p. 591 (2000).
– reference: 8) Y. Yin: J. Messier and J. Hopwood: IEEE Trans. Plasma Sci. 27, 1516 (1999).
– reference: 7) U. Engel, et al.: Anal. Chem. 72, 193 (2000).
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Title VHF駆動によるマイクロプラズマの生成技術とマイクロ化学分析システムへの応用
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