超音波援用によるガラスの小径ドリル加工に関する研究 第1報：超音波援用が穴加工精度に及ぼす影響
半導体製造装置や医療機器においては，φ1mmに満たない微細穴をガラスなどの脆性材料に高精度かつ高能率に加工する技術が要求されている．ガラスなどの硬脆材料は，一般的には切削加工が困難とされるが，切削加工での加工実用化に対する要望は大きい．これらの要望に応えるため本研究では，ガラス材料に対し，超音波援用切削法を適用したφ0.3mmのドリル加工を行い，工具接触直後の工具振れ回り軌道および切削抵抗に関して計測および評価を行った．その結果，超音波援用切削時は工具食いつき時のらせん状の切削抵抗が消滅することが判明し，加工穴の位置決め精度が慣用加工に比べて向上することがわかった．...
Saved in:
| Published in | Journal of the Japan Society for Abrasive Technology Vol. 61; no. 11; pp. 594 - 599 |
|---|---|
| Main Authors | , , , , |
| Format | Journal Article |
| Language | Japanese |
| Published |
Tokyo
社団法人 砥粒加工学会
01.11.2017
Japan Science and Technology Agency |
| Subjects | |
| Online Access | Get full text |
| ISSN | 0914-2703 1880-7534 |
| DOI | 10.11420/jsat.61.594 |
Cover
| Abstract | 半導体製造装置や医療機器においては，φ1mmに満たない微細穴をガラスなどの脆性材料に高精度かつ高能率に加工する技術が要求されている．ガラスなどの硬脆材料は，一般的には切削加工が困難とされるが，切削加工での加工実用化に対する要望は大きい．これらの要望に応えるため本研究では，ガラス材料に対し，超音波援用切削法を適用したφ0.3mmのドリル加工を行い，工具接触直後の工具振れ回り軌道および切削抵抗に関して計測および評価を行った．その結果，超音波援用切削時は工具食いつき時のらせん状の切削抵抗が消滅することが判明し，加工穴の位置決め精度が慣用加工に比べて向上することがわかった． |
|---|---|
| AbstractList | In semiconductor equipment and medical equipment industries, there is a requirement for a technique to accurately and efficiently process fine holes <1 mm in diameter in brittle materials, such as glass. Generally, hard and brittle materials, such as glass, are difficult to cut. However, there are many requirements for practical applications by cutting. To respond to these demands, an ultrasound-assisted method was applied to drill 0.3-mm holes, and the tool behavior and cutting resistance immediately after tool contact were evaluated. The results indicated that the spiral-shaped cutting force disappeared at contact with the drill when using ultrasonic drilling, and the hole positioning accuracy was improved compared to conventional drilling. 半導体製造装置や医療機器においては，φ1mmに満たない微細穴をガラスなどの脆性材料に高精度かつ高能率に加工する技術が要求されている．ガラスなどの硬脆材料は，一般的には切削加工が困難とされるが，切削加工での加工実用化に対する要望は大きい．これらの要望に応えるため本研究では，ガラス材料に対し，超音波援用切削法を適用したφ0.3mmのドリル加工を行い，工具接触直後の工具振れ回り軌道および切削抵抗に関して計測および評価を行った．その結果，超音波援用切削時は工具食いつき時のらせん状の切削抵抗が消滅することが判明し，加工穴の位置決め精度が慣用加工に比べて向上することがわかった． |
| Author | 石黒, 輝雄 佐野, 正明 清水, 毅 米山, 陽 石井, 孝明 |
| Author_xml | – sequence: 1 fullname: 石黒, 輝雄 organization: 山梨県産業技術センター – sequence: 1 fullname: 佐野, 正明 organization: 山梨県産業技術センター – sequence: 1 fullname: 米山, 陽 organization: 山梨県産業技術センター – sequence: 1 fullname: 清水, 毅 organization: 山梨大学 – sequence: 1 fullname: 石井, 孝明 organization: 山梨大学 |
| BookMark | eNo9kD9Lw0AAxQ9RsNZufgPn1LvL5S43iRT_YcGle7gkF22obU3SwbGJgn-GLkVwshQEa0WESsXFL3Oktd_ClIrLe8P78R68NbBcb9QlABsIFhEiGG75oYiKFBUNTpZADpkm1Jihk2WQgxwRDTOor4JCGFZtSCGBnCEjB45-xlezx9Fk1J90PqbdZ9UeqvhaxXcqflXJQMVfqv2WvnfS70uV3KjkRSXD9LaXfj5l5Oy-r9oPGTztdaeD8TpY8UQtlIU_z4PK3m6ldKCVj_cPSztlzUemQTXmGAaxXcM2uefajsm5qwvpOoLZGHNsM8_RTcqJ5A4VDGImGSPUwRJxz0NMz4PNRW0zaJy3ZBhZfqMV1LNFC0PCsAE5pRm1vaD8MBIn0moG1TMRXFgiiKpOTVrztyyKLITmmn32nzinIrB8of8CjLaBAw |
| ContentType | Journal Article |
| Copyright | 2017 社団法人 砥粒加工学会 Copyright Japan Science and Technology Agency 2017 |
| Copyright_xml | – notice: 2017 社団法人 砥粒加工学会 – notice: Copyright Japan Science and Technology Agency 2017 |
| DBID | 7SR 8BQ 8FD JG9 |
| DOI | 10.11420/jsat.61.594 |
| DatabaseName | Engineered Materials Abstracts METADEX Technology Research Database Materials Research Database |
| DatabaseTitle | Materials Research Database Engineered Materials Abstracts Technology Research Database METADEX |
| DatabaseTitleList | Materials Research Database |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering |
| EISSN | 1880-7534 |
| EndPage | 599 |
| ExternalDocumentID | article_jsat_61_11_61_594_article_char_ja |
| GroupedDBID | 2WC ABJNI ACGFS ALMA_UNASSIGNED_HOLDINGS JSF KQ8 OK1 RJT 7SR 8BQ 8FD JG9 |
| ID | FETCH-LOGICAL-j1856-7c554bd5b89fdbc899d3aedca7b2292b7fc38694e9c6a7027e7746c2e19ff173 |
| ISSN | 0914-2703 |
| IngestDate | Sun Jul 13 04:12:20 EDT 2025 Wed Sep 03 06:27:21 EDT 2025 |
| IsDoiOpenAccess | true |
| IsOpenAccess | true |
| IsPeerReviewed | false |
| IsScholarly | true |
| Issue | 11 |
| Language | Japanese |
| LinkModel | OpenURL |
| MergedId | FETCHMERGED-LOGICAL-j1856-7c554bd5b89fdbc899d3aedca7b2292b7fc38694e9c6a7027e7746c2e19ff173 |
| Notes | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 14 |
| OpenAccessLink | https://www.jstage.jst.go.jp/article/jsat/61/11/61_594/_article/-char/ja |
| PQID | 2047250966 |
| PQPubID | 2048455 |
| PageCount | 6 |
| ParticipantIDs | proquest_journals_2047250966 jstage_primary_article_jsat_61_11_61_594_article_char_ja |
| PublicationCentury | 2000 |
| PublicationDate | 2017/11/01 |
| PublicationDateYYYYMMDD | 2017-11-01 |
| PublicationDate_xml | – month: 11 year: 2017 text: 2017/11/01 day: 01 |
| PublicationDecade | 2010 |
| PublicationPlace | Tokyo |
| PublicationPlace_xml | – name: Tokyo |
| PublicationTitle | Journal of the Japan Society for Abrasive Technology |
| PublicationTitleAlternate | 砥粒加工学会誌 |
| PublicationYear | 2017 |
| Publisher | 社団法人 砥粒加工学会 Japan Science and Technology Agency |
| Publisher_xml | – name: 社団法人 砥粒加工学会 – name: Japan Science and Technology Agency |
| References | 13) Junji SHIBATA, Masao MAYUZUMI and Takeshi SHIMIZU, Ductile-regime Chip Formation of Glass and the Effect of the Shape on the Cutting Edge with the Intent to Produce Flow-type Chips, The Japan Society of Mechanical Engineers, 64, 627 (1998) 4465 (in Japanese). 7) 野間一希ほか：超音波振動を援用したヘリカル加工による化学強化ガラスの加工特性に関する研究，2014年度精密工学会春季大会講演論文集，(2014) 1031 1) 狩野勝吉：難削材・新素材の切削加工ハンドブック，工業調査会，(2002) 434. 10) 隈部淳一郎：精密加工振動切削-基礎と応用-，実教出版，(1979) 54. 9) Akira YONEYAMA, Teruo ISHIGURO, Masaaki SANO and Tsuyoshi SHIMIZU: Study on High Aspect Ratio Micro Hole Drilling(2nd Report), Report of the Yamanashi Industrial Technology Center,29 (2015) 7. 12) Hiromichi ONIKURA, Osamu OHNISHI, Jinhai FENG, Toshikazu KANDA and Takahiro MORITA: Effect of Ultrasonic Vibration on Machining Accuracy in Microdrilling, Journal of the Japan Society for Precision Engineering, 62, 5(1996) 676(in Japanese). 2) Akira MIZOBUCHI, Hitoshi OGAWA and Masahiro MASUDA: Drilling Conditions and Crack Restraint of Step Drilling Method in Through-Hole Drilling of Glass Plate, Journal of the Japan Society for Precision Engineering, 77, 3(2011) 296(in Japanese). 4) Akira MIZOBUCHI, Yasuhiro IWAMOTO and Tohru ISHIDA: Slanting-hole drilling of glass plete using an electroplated diamond tool, Journal of the Japan Society for Abrasive Technology, 58, 10 (2014) 658(in Japanese). 6) Yohei NAMBU, Kazuhiro OCHIAI, Kenichiro HORIO, Junichi KANEKO, Takeshi WATANABE and Shinichi MATSUDA: High-Aspect-Ratio Microdrilling Assisted by Ultrasonic Vibration, Journal of the Japan Society for Precision Engineering, 77, 3 (2011) 306 (in Japanese). 8) 大関宏夫，新井史人：切削抵抗に基づくガラスのドリル加工の最適化制御，2010年度精密工学会春季大会学術講演会講演論文集，(2010)353 3) Akira MIZOBUCHI, Hitoshi OGAWA: Crack size and processing efficiency in through hole drilling of glass plate using an electroplated diamong tool, Journal of the Japan Society for Abrasive Technology, 54, 3 (2010) 145(in Japanese). 5) Kai EGASIRA, Ryokei KUMAGAI and Hiroshi HAYASE: Drilling of microholes in grass by ultrasonic grinding using ultrasmall-diameter tools, Journal of the Japan Society for Abrasive Technology, 57, 2 (2013) 102(in Japanese). 11) Masasuke TUEDA, Yosio HASEGAWA and Hirosi KIMURA: On Walking Phenomenon of Drill, The Japan Society of Mechanical Engineers, 27, 178 (1961) 816 (in Japanese). |
| References_xml | – reference: 13) Junji SHIBATA, Masao MAYUZUMI and Takeshi SHIMIZU, Ductile-regime Chip Formation of Glass and the Effect of the Shape on the Cutting Edge with the Intent to Produce Flow-type Chips, The Japan Society of Mechanical Engineers, 64, 627 (1998) 4465 (in Japanese). – reference: 9) Akira YONEYAMA, Teruo ISHIGURO, Masaaki SANO and Tsuyoshi SHIMIZU: Study on High Aspect Ratio Micro Hole Drilling(2nd Report), Report of the Yamanashi Industrial Technology Center,29 (2015) 7. – reference: 12) Hiromichi ONIKURA, Osamu OHNISHI, Jinhai FENG, Toshikazu KANDA and Takahiro MORITA: Effect of Ultrasonic Vibration on Machining Accuracy in Microdrilling, Journal of the Japan Society for Precision Engineering, 62, 5(1996) 676(in Japanese). – reference: 7) 野間一希ほか：超音波振動を援用したヘリカル加工による化学強化ガラスの加工特性に関する研究，2014年度精密工学会春季大会講演論文集，(2014) 1031． – reference: 10) 隈部淳一郎：精密加工振動切削-基礎と応用-，実教出版，(1979) 54. – reference: 4) Akira MIZOBUCHI, Yasuhiro IWAMOTO and Tohru ISHIDA: Slanting-hole drilling of glass plete using an electroplated diamond tool, Journal of the Japan Society for Abrasive Technology, 58, 10 (2014) 658(in Japanese). – reference: 6) Yohei NAMBU, Kazuhiro OCHIAI, Kenichiro HORIO, Junichi KANEKO, Takeshi WATANABE and Shinichi MATSUDA: High-Aspect-Ratio Microdrilling Assisted by Ultrasonic Vibration, Journal of the Japan Society for Precision Engineering, 77, 3 (2011) 306 (in Japanese). – reference: 5) Kai EGASIRA, Ryokei KUMAGAI and Hiroshi HAYASE: Drilling of microholes in grass by ultrasonic grinding using ultrasmall-diameter tools, Journal of the Japan Society for Abrasive Technology, 57, 2 (2013) 102(in Japanese). – reference: 3) Akira MIZOBUCHI, Hitoshi OGAWA: Crack size and processing efficiency in through hole drilling of glass plate using an electroplated diamong tool, Journal of the Japan Society for Abrasive Technology, 54, 3 (2010) 145(in Japanese). – reference: 11) Masasuke TUEDA, Yosio HASEGAWA and Hirosi KIMURA: On Walking Phenomenon of Drill, The Japan Society of Mechanical Engineers, 27, 178 (1961) 816 (in Japanese). – reference: 1) 狩野勝吉：難削材・新素材の切削加工ハンドブック，工業調査会，(2002) 434. – reference: 8) 大関宏夫，新井史人：切削抵抗に基づくガラスのドリル加工の最適化制御，2010年度精密工学会春季大会学術講演会講演論文集，(2010)353． – reference: 2) Akira MIZOBUCHI, Hitoshi OGAWA and Masahiro MASUDA: Drilling Conditions and Crack Restraint of Step Drilling Method in Through-Hole Drilling of Glass Plate, Journal of the Japan Society for Precision Engineering, 77, 3(2011) 296(in Japanese). |
| SSID | ssib060409715 ssj0069101 ssib002484473 ssib000961631 ssib031741145 |
| Score | 2.0944057 |
| Snippet | ... In semiconductor equipment and medical equipment industries, there is a requirement for a technique to accurately and efficiently process fine holes <1 mm in... |
| SourceID | proquest jstage |
| SourceType | Aggregation Database Publisher |
| StartPage | 594 |
| SubjectTerms | Brittle materials Cutting force Cutting parameters Cutting resistance Drilling Drilling machines (tools) Medical equipment Ultrasonic methods Ultrasonic testing Ultrasonic vibration |
| Subtitle | 第1報：超音波援用が穴加工精度に及ぼす影響 |
| Title | 超音波援用によるガラスの小径ドリル加工に関する研究 |
| URI | https://www.jstage.jst.go.jp/article/jsat/61/11/61_594/_article/-char/ja https://www.proquest.com/docview/2047250966 |
| Volume | 61 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| ispartofPNX | 砥粒加工学会誌, 2017/11/01, Vol.61(11), pp.594-599 |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnR1Na9VAMNR60YP4idUqPTgnSU3yNvtx3PSlFIuCUKG3kE_hHarY14u3vqfgx6GXIniyFARrRYRKxYs_xvBa-y-c3STvbWkPtfBYhsns7LyZZHdmk5m1rDtF5sRuyjNbiNSzSUKIzbPctYuiYHmakcThKsH5wUM695jcX_QXx878Mb5aWukm0-mLY_NKTmNVxKFdVZbsf1h2yBQRCKN9sUULY3siG0PIIaDAfQgFiFkIWhBS1UpPARwxBEIGgoDkELbQbQQZaMADzhugwcgZDag35zUmEE2vEEIfAkfxVEAInNTEXDS9ZAMEioZLkI4mZiB9Y3QUlWoJNUYIQwymuggtM8oQUNN1rq8qVgwCD4R33Cg-yDZICiGBYAaEVCpCwfhwM1jro1IVjhAoNniXaU0ifVuLFwAnI3rk1AbhqCucAQ8reqoH0goXHLEm_8DV_H0NuBW9UP80aI_I0FBcm44qvaKhGrazUB0v1GzG4ALvHtqM0Zogygg4BAorG7MLX0sr8Xf3dOoyd25dotIIq3Uhr9YtnIZtjDyJubBVVe6bB9g1lim_Oli69nj86oiqo4sp8dTnp53luDtN3elhp0PlyeubP1JUEXUxolQt0kbNFZU-GHUwhjnrMaY_pZh_ZIQAgmJIYOZWc0JGLjW6t8Q13nxTRxVoc4chLkV3V5-K2SilSW5B2e8ZkqOD2cFw68lRn0s7kgsXrQt1BDglK7kvWWOd-LJ13qgLesWa_7v76uDjzt7O5t7aj_31z-Xqdtl7Xfbelb2vZX-r7P0qV78Nvq8Nfr8s-2_K_peyvz14uzH4-QkpD95vlqsfkHh_Y31_a_eqtTAbLszM2fWpJ3YHfWdqsxQ9_CTzEy6KLEm5EFkrzrM0ZonnCS9hRdriVJBcpDRmjsdyjOBo6uWuKAqXta5Z40tPl_Lr1hT1U8qTrCjQqSctUsQYrPiE-ayIU5yPxYTFK51Ez6rKNtGJjTlhTTZajOoJcTnyVOVZVU6K3jg955vWudGDNWmNd5-v5LfQ7-8mt_WN8w8emNUR |
| linkProvider | Colorado Alliance of Research Libraries |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=%E8%B6%85%E9%9F%B3%E6%B3%A2%E6%8F%B4%E7%94%A8%E3%81%AB%E3%82%88%E3%82%8B%E3%82%AC%E3%83%A9%E3%82%B9%E3%81%AE%E5%B0%8F%E5%BE%84%E3%83%89%E3%83%AA%E3%83%AB%E5%8A%A0%E5%B7%A5%E3%81%AB%E9%96%A2%E3%81%99%E3%82%8B%E7%A0%94%E7%A9%B6&rft.jtitle=%E7%A0%A5%E7%B2%92%E5%8A%A0%E5%B7%A5%E5%AD%A6%E4%BC%9A%E8%AA%8C&rft.au=%E7%9F%B3%E9%BB%92%2C+%E8%BC%9D%E9%9B%84&rft.au=%E4%BD%90%E9%87%8E%2C+%E6%AD%A3%E6%98%8E&rft.au=%E7%B1%B3%E5%B1%B1%2C+%E9%99%BD&rft.au=%E6%B8%85%E6%B0%B4%2C+%E6%AF%85&rft.date=2017-11-01&rft.pub=%E7%A4%BE%E5%9B%A3%E6%B3%95%E4%BA%BA+%E7%A0%A5%E7%B2%92%E5%8A%A0%E5%B7%A5%E5%AD%A6%E4%BC%9A&rft.issn=0914-2703&rft.eissn=1880-7534&rft.volume=61&rft.issue=11&rft.spage=594&rft.epage=599&rft_id=info:doi/10.11420%2Fjsat.61.594&rft.externalDocID=article_jsat_61_11_61_594_article_char_ja |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0914-2703&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0914-2703&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0914-2703&client=summon |