Scroll Vacuum Pump

Scroll machines have very good sealing characteristics, and the authors have attempted to develop a scroll vacuum pump. A rotating mechanism was employed instead of an orbiting mechanism from the point of view of load pattern and mechanical simplification. The axial and the radial sealing techniques...

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Bibliographic Details
Published inNihon Kikai Gakkai rombunshuu. B hen Vol. 54; no. 498; pp. 410 - 413
Main Authors MORISHITA, Etsuo, SUGANAMI, Takuya, NISHIDA, Mitsuhiro, KITORA, Yoshihisa, YAMAMOTO, Sakuei, FUJII, Kosaburo
Format Journal Article
LanguageJapanese
Published The Japan Society of Mechanical Engineers 01.01.1988
Subjects
design
Seal
seals
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Summary:Scroll machines have very good sealing characteristics, and the authors have attempted to develop a scroll vacuum pump. A rotating mechanism was employed instead of an orbiting mechanism from the point of view of load pattern and mechanical simplification. The axial and the radial sealing techniques were utilized. The radial sealing mechanism is particularly easy and effective due to the stationary seal line. A spiral with zero top clearance volume and a compact Oldham coupling were the other key technologies. Vacuums of 1 Pa (10-2 Torr) for dry operation, and of 10-2 Pa (10-4 Torr) for oil flooded operation were achieved at 1 800 rpm.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0387-5016
1884-8346
DOI:10.1299/kikaib.54.410